X-ray characterization of indium phosphide substrates

被引：0

作者：

Moore, C.D. ^{[1
,2
]}

Tanner, B.K. ^{[1
]}

机构：

[1] Department of Physics, University of Durham, South Road, Durham DH1 3LE, United Kingdom

[2] Dept. of Mat. Sci. and Engineering, University of California Los Angeles, 6532 Boelter Hall, Los Angeles, CA 90095-1595, United States

来源：

Materials Science and Engineering B: Solid-State Materials for Advanced Technology | 1999年 / 66卷 / 01期

基金：

英国工程与自然科学研究理事会;

关键词：

Crystal growth from melt - Crystal lattices - Dislocations (crystals) - Semiconductor doping - Semiconductor growth - Substrates - Sulfur - X ray crystallography;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The perfection of vertical gradient freeze (VGF) and liquid encapsulated Czochralski (LEC) grown 〈001〉 sulphur-doped InP crystals has been studied by high resolution X-ray diffraction and synchrotron X-ray topography. Of those examined, all VGF crystals except one were dislocation-free, the exception having a uniform dislocation density of about 200 cm-2 resulting from slip. The double axis diffraction maps and double crystal topographs showed most crystals to have a uniform lattice curvature. The largest radii of curvature were from VGF wafers, while the smallest values were for LEC wafers.

引用

页码：11 / 14

共 50 条

[31] Characterization of SiC substrates using X-ray rocking curve mapping
Yoganathan, M.
Emorhokpor, E.
Kerr, T.
Gupta, A.
Tanner, C. D.
Zwieback, I.
SILICON CARBIDE AND RELATED MATERIALS 2005, PTS 1 AND 2, 2006, 527-529 : 729 - 732
[32] X-RAY ABSORPTION AND X-RAY CONDUCTION OF INDIUM SELENIDE SINGLE-CRYSTALS
BAGIRZADE, EF
ZHURAVLEV, VM
ISKENDEROV, GI
INORGANIC MATERIALS, 1988, 24 (12) : 1673 - 1677
[33] X-RAY CRYSTALLOGRAPHIC STUDY OF INDIUM MONOSELENIDE
NAGPAL, KC
ALI, SZ
INDIAN JOURNAL OF PURE & APPLIED PHYSICS, 1976, 14 (06) : 434 - 440
[34] X-RAY STUDY OF THERMAL VIBRATIONS IN INDIUM
VOLD, CL
RICHARDS, LE
REPORT OF NRL PROGRESS, 1975, (AUG): : 37 - 38
[35] AN X-RAY DIFFRACTION INVESTIGATION OF LIQUID INDIUM
ORTON, BR
SMITH, SP
PHILOSOPHICAL MAGAZINE, 1966, 14 (130): : 873 - &
[36] INDIUM-ANTIMONIDE AS AN X-RAY MONOCHROMATOR
GOHSHI, Y
HIRAO, O
MURATA, M
TANOUE, T
TSURUOKA, M
X-RAY SPECTROMETRY, 1975, 4 (02) : 74 - 76
[37] SURFACE CHARACTERIZATION OF NICKEL BORIDE AND NICKEL PHOSPHIDE CATALYSTS BY X-RAY PHOTOELECTRON-SPECTROSCOPY
OKAMOTO, Y
NITTA, Y
IMANAKA, T
TERANISHI, S
JOURNAL OF THE CHEMICAL SOCIETY-FARADAY TRANSACTIONS I, 1979, 75 : 2027 - 2039
[38] Real-time observation of surface morphology of indium phosphide MOVPE growth with using X-ray reflectivity technique
Kawamura, T
Watanabe, Y
Fujikawa, S
Bhunia, S
Uchida, K
Matsui, J
Kagoshima, Y
Tsusaka, Y
JOURNAL OF CRYSTAL GROWTH, 2002, 237 : 398 - 402
[39] X-ray characterization of the Icarus ultrafast x-ray imager
Looker, Quinn
Colombo, Anthony P.
Kimmel, Mark
Porter, John L.
REVIEW OF SCIENTIFIC INSTRUMENTS, 2020, 91 (04):
[40] X-ray absorption spectroscopy of indium nitride, indium oxide, and their alloys
T-Thienprasert, Jiraroj
Rujirawat, Saroj
Nukeaw, Jiti
Limpijumnong, Sukit
COMPUTATIONAL MATERIALS SCIENCE, 2010, 49 : S37 - S42

← 1 2 3 4 5 →