Stresses in thin Au films on γ alumina

被引:0
|
作者
Lab SERMEC, Marseille, France [1 ]
机构
来源
Vacuum | / 1-2卷 / 73-78期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [11] INTRINSIC STRESSES IN COMPOSITIONALLY MODULATED AU-NI THIN-FILMS AND THE SUPERMODULUS EFFECT
    BAKER, SP
    NIX, WD
    JOURNAL OF MATERIALS RESEARCH, 1994, 9 (12) : 3145 - 3152
  • [12] Influence of annealing temperature on composition and stresses of alumina thin films elaborated by the sol-gel method
    Pillonnet, A
    Brenier, R
    Garapon, C
    Mugnier, J
    OPTICAL DESIGN AND ENGINEERING, 2004, 5249 : 657 - 667
  • [13] Stresses in thin films and interconnect lines
    Gudmundson, P
    Wikström, A
    MICROELECTRONIC ENGINEERING, 2002, 60 (1-2) : 17 - 29
  • [14] THERMAL STRESSES IN THIN METALLIC FILMS
    GOROKHOV, EA
    POPOV, VI
    BURAVIKH.VA
    IZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII FIZIKA, 1969, (07): : 124 - &
  • [15] STRESSES IN THIN POLYCRYSTALLINE SILICON FILMS
    KOLESHKO, VM
    BELITSKY, VF
    KIRYUSHIN, IV
    THIN SOLID FILMS, 1988, 162 (1-2) : 365 - 374
  • [16] STRESSES IN THIN-FILMS FOR HYPERFILTRATION
    CHEN, Y
    JOURNAL OF THE FRANKLIN INSTITUTE-ENGINEERING AND APPLIED MATHEMATICS, 1976, 301 (05): : 421 - 427
  • [17] Stresses in thin films: an experimental study
    N. Sharma
    M. Hooda
    S. K. Sharma
    Indian Journal of Physics, 2019, 93 : 159 - 167
  • [18] Stresses in sputtered RUOx thin films
    Desu, SB
    Vijay, DP
    Ramanathan, S
    Bhatt, HD
    Tirumala, S
    THIN SOLID FILMS, 1999, 350 (1-2) : 21 - 29
  • [19] Residual stresses in polycrystalline thin films
    Scardi, P
    Dong, YH
    ECRS 5: PROCEEDINGS OF THE FIFTH EUROPEAN CONFERENCE ON RESIDUAL STRESSES, 2000, 347-3 : 399 - 404
  • [20] RESIDUAL STRESSES IN EVAPORATED THIN FILMS
    KLOKHOLM, E
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1965, 2 (05): : 277 - &