PHOTOMASK MATERIALS REVIEW.

被引：0
|
作者：
O'Neill, Timothy G.
机构：
来源：
Semiconductor International | 1981年 / 4卷 / 08期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
With decreasing linewidths, photomask materials have changed from inexpensive glass substrates coated with photographic emulsions to expensive low thermal expansion substrates coated with chrome. Along with material changes, specifications have been tightened requiring defect-free substrates that are as flat as possible and coatings that have consistent quality. The result is more expensive, higher yielding photomasks.
引用
收藏
页码：81 / 84
相关论文
共 50 条
  • [1] Review. Materials science
    不详
    ZEITSCHRIFT DES VEREINES DEUTSCHER INGENIEURE, 1931, 75 : 55 - 56
  • [2] GLASSMAKING RAW MATERIALS - A REVIEW.
    Reynolds, Alan
    Glass, 1987, 64 (12):
  • [3] Materials review. Working with composites
    Professional Engineering, 1994, 7 (09)
  • [4] OSE INSPECTION OF MATERIALS CONTROL AND ACCOUNTABILITY: REVIEW.
    Coady, Kelly J.
    Nuclear materials management, 1987, 16 : 531 - 534
  • [5] Characterization of porous materials by adsorption methods: A review.
    Olivier, J
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2001, 221 : U224 - U224
  • [6] PRINTED CIRCUIT MULTILAYER PROCESSES AND MATERIALS REVIEW.
    Dominici, Peter A.
    Kinsey, Steve
    Electron Manuf, 1988, 34 (05): : 14 - 16
  • [7] Raw materials: the importance of quality and safety. A review.
    Salgueiro, L.
    Martins, A. P.
    Correia, H.
    FLAVOUR AND FRAGRANCE JOURNAL, 2010, 25 (05) : 253 - 271
  • [8] MINERAL MATERIALS MODELING: STATE-OF-THE-ART REVIEW.
    Vogely, William A., 1976, Resour for the Future (RFF Work Pap EN-5), Washington, DC
  • [9] Dental materials: 1996 literature review. Part 2
    Strang, R
    Whitters, CJ
    Brown, D
    Clarke, RL
    Curtis, RV
    Hatton, PV
    Ireland, AJ
    Lloyd, CH
    McCabe, JF
    Nicholson, JW
    Scrimgeour, SN
    Setcos, JC
    Sherriff, M
    van Noort, R
    Watts, DC
    Woods, D
    JOURNAL OF DENTISTRY, 1998, 26 (04) : 273 - 291
  • [10] Immobilization of Lipases - A Review. Part II: Carrier Materials
    Thangaraj, Baskar
    Solomon, Pravin Raj
    CHEMBIOENG REVIEWS, 2019, 6 (05) : 167 - 194
12345