Gas flow sputtering of oxide coatings: practical aspects of the process

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Fraunhofer-Inst fuer Schicht-und, Oberflaechentechnik, Braunschweig, Germany [1 ]
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Surf Coat Technol | / 1 -3 pt 1卷 / 218-224期
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The authors gratefully acknowledge the assistance Mrs C. Steinberg. The work was supported in part by the Bundesministerium fur Bildung; Forschung und Technologie under grant nos. 13N5993 and 13N6466;
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