Ion beam synthesis of SiC layers in SIMOX material

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作者：
Goetz, B. [1 ]
Lindner, J.K.N. [1 ]
Stritzker, B. [1 ]
机构：
[1] Universitaet Augsburg, Augsburg, Germany
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1997年 / 127-128卷
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页码：333 / 336
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