High-performance EUV/soft X-ray ellipsometry system using multilayer mirrors

被引：0
|
作者：
Kawamura, Tomoaki
Delaunay, Jean-Jacques
Takenaka, Hisataka
Hayashi, Takayoshi
Watanabe, Yoshio
机构：
[1] NTT Basic Research Laboratories, 3-1 Morinosato, Wakamiya, Atsugi, Kanagawa 243-01, Japan
[2] NTT Intgd. Info. Ener. Syst. Labs., 3-9-11 Midoricho, Musashino, Tokyo 180, Japan
[3] NTT Advanced Technology Corporation, 3-9-11 Midoricho, Musashino, Tokyo 180, Japan
来源：
Journal of Synchrotron Radiation | 1998年 / 5卷 / 03期
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摘要：
9
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页码：735 / 737
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