Study of HF defects in thin, bonded silicon-on-insulator dependent on original wafers

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Isobe R and D Center, Shin-Estu Handotai Co., Ltd., 2-13-1, Isobe, Annaka, Gunma 379-0196, Japan [1 ]
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Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap | / 5 A卷 / 2694-2698期
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