Thermal desorption of surface phosphorus on Si(100) surfaces

被引：0

作者：

Hirose, F. ^{[1
]}

Sakamoto, H. ^{[1
]}

机构：

[1] Advanced Technology Research Center, Mitsubishi Heavy Indust. L., Yokohama, Japan

来源：

Surface Science | 1999年 / 430卷 / 01期

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引用

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[31] P2 desorption from phosphine decomposition on Si(100) surfaces
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