SPATIAL AND TEMPORAL EVOLUTION OF THE GLOW IN AN RF DISCHARGE.

被引：0

作者：

Hebner, G.A. ^{[1
]}

Verdeyen, J.T. ^{[1
]}

机构：

[1] Univ of Illinois, Urbana, IL, USA, Univ of Illinois, Urbana, IL, USA

来源：

IEEE Transactions on Plasma Science | 1986年 / PS-14卷 / 02期

关键词：

IONS; -; PHOTOGRAPHY; HIGH SPEED - PLASMAS;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

The temporal and spatial evolution of the glow in a 1. 0- and 2. 6-MHz radio-frequency (RF) excited discharge has been photographed with a high-speed framing camera. Evidence is presented showing electrons with a ballistic behavior in the body of the glow and a time delay between the maximum optical intensity of the glow and the maximum RF voltage. The effect of the dc self-bias on the glow is also shown. The implications of these observations on the dynamics of the ion motion in the plasma are discussed.

引用

页码：132 / 136

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