SPATIAL AND TEMPORAL EVOLUTION OF THE GLOW IN AN RF DISCHARGE.

被引:0
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作者
Hebner, G.A. [1 ]
Verdeyen, J.T. [1 ]
机构
[1] Univ of Illinois, Urbana, IL, USA, Univ of Illinois, Urbana, IL, USA
关键词
IONS; -; PHOTOGRAPHY; HIGH SPEED - PLASMAS;
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摘要
The temporal and spatial evolution of the glow in a 1. 0- and 2. 6-MHz radio-frequency (RF) excited discharge has been photographed with a high-speed framing camera. Evidence is presented showing electrons with a ballistic behavior in the body of the glow and a time delay between the maximum optical intensity of the glow and the maximum RF voltage. The effect of the dc self-bias on the glow is also shown. The implications of these observations on the dynamics of the ion motion in the plasma are discussed.
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页码:132 / 136
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