共 30 条
- [1] The Gaseous Electronic Conference (GEC) reference cell as a benchmark for understanding microelectronics processing plasmasPHYSICS OF PLASMAS, 1999, 6 (05) : 2307 - 2313Brake, MLPender, JFournier, J
- [2] Dynamic laser light scattering studies of dusty plasmas in the Gaseous Electronics Conference Reference CellJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (02): : 608 - 614Anderson, HMRadovanov, SB
- [3] THE GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELL - AN INTRODUCTIONJOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1995, 100 (04) : 327 - 339OLTHOFF, JKGREENBERG, KE
- [4] Particle trapping, transport, and charge in capacitively and inductively coupled argon plasmas in a Gaseous Electronics Conference Reference CellJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1996, 14 (02): : 634 - 638Collins, SMBrown, DAOHanlon, JFCarlile, RN
- [5] OPTICAL DIAGNOSTICS IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE CELLJOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1995, 100 (04) : 373 - 382HEBNER, GAGREENBERG, KE
- [7] Fourier transform infrared spectroscopy of CF4 plasmas in the GEC reference cellPLASMA SOURCES SCIENCE & TECHNOLOGY, 2002, 11 (01): : 77 - 90Cruden, BARao, MVVSSharma, SPMeyyappan, M
- [8] DUSTY PLASMA STUDIES IN THE GASEOUS ELECTRONICS CONFERENCE REFERENCE CELLJOURNAL OF RESEARCH OF THE NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY, 1995, 100 (04) : 449 - 462ANDERSON, HMRADOVANOV, SB
- [9] Postplasma particle dynamics in a gaseous electronics conference RF reference cell J Vac Sci Technol A, 6 (2950):
- [10] POSTPLASMA PARTICLE DYNAMICS IN A GASEOUS ELECTRONICS CONFERENCE RF REFERENCE CELLJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (06): : 2950 - 2953COLLINS, SMBROWN, DAOHANLON, JFCARLILE, RN