Raman study of tungsten disilicide formation in thin films

被引：0
|
作者：
Chaix-Pluchery, O. [1 ]
Lucazeau, G. [2 ]
Meyer, F. [3 ]
Aubry-Fortuna, V. [3 ]
Madar, R. [1 ]
机构：
[1] LMGP, ENSPG, INPG, BP 46, 38402 St Martin d'Hères Cedex, France
[2] LEPMI, ENSEEG, INPG, BP 75, 38402 St Martin d'Hères Cedex, France
[3] IEF, Université Paris Sud, Bât. 220, 91405 Orsay Cedex, France
来源：
Vide: Science, Technique et Applications | 1997年 / 53卷 / 283 SUPPL.期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：176 / 177
相关论文
共 50 条
  • [21] Formation of ⊥c texture of tungsten disulfide thin films with nickel
    Sadale, S. B.
    Barman, S. R.
    Patil, P. S.
    APPLIED SURFACE SCIENCE, 2007, 253 (07) : 3489 - 3495
  • [22] EFFECTS OF RAPID THERMAL-PROCESSING ON THE FORMATION OF UNIFORM TETRAGONAL TUNGSTEN DISILICIDE FILMS ON SI(100) SUBSTRATES
    SIEGAL, MP
    SANTIAGO, JJ
    JOURNAL OF APPLIED PHYSICS, 1988, 63 (02) : 525 - 529
  • [23] Optical properties of semiconducting iron disilicide thin films
    Ozvold, M
    Mrafko, P
    Gasparík, V
    CZECHOSLOVAK JOURNAL OF PHYSICS, 2000, 50 (05) : 677 - 686
  • [24] Optical properties of semiconducting iron disilicide thin films
    Ozvold, M
    Gasparík, V
    Mrafko, P
    FOURTH INTERNATIONAL CONFERENCE ON MATERIAL SCIENCE AND MATERIAL PROPERTIES FOR INFRARED OPTOELECTRONICS, 1999, 3890 : 177 - 184
  • [25] Stable tungsten disilicide contacts for surface and thin film resistivity measurements
    Jnawali, G.
    Heringdorf, F. -J. Meyer Zu
    Wall, D.
    Sindermann, S.
    Hoegen, M. Horn-von
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2009, 27 (01): : 180 - 183
  • [26] Regularities of crystallization of thin films of disilicide solid solution
    Dvorina, L.
    ACTA CRYSTALLOGRAPHICA A-FOUNDATION AND ADVANCES, 2000, 56 : S403 - S403
  • [27] Intrinsic photoconductivity in chromium disilicide epitaxial thin films
    N. G. Galkin
    A. V. Konchenko
    A. M. Maslov
    Semiconductors, 1997, 31 : 826 - 828
  • [28] Intrinsic photoconductivity in chromium disilicide epitaxial thin films
    Galkin, NG
    Konchenko, AV
    Maslov, AM
    SEMICONDUCTORS, 1997, 31 (08) : 826 - 828
  • [29] IDENTIFICATION OF TITANIUM DISILICIDE THIN-FILMS BY SIMS
    ANTONOV, SL
    BELEVSKY, VI
    GUSEV, IV
    ORLIKOVSKY, AA
    VALIEV, KA
    VASILIEV, AG
    VACUUM, 1992, 43 (5-7) : 635 - 636
  • [30] Raman study of gallium arsenide thin films
    Desnica, I.D., 1600, (170):
12345