Anhydrous metal nitrates as volatile single source precursors for the CVD of metal oxide films

被引：0
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作者：
Colombo, Daniel G. [1 ]
Gilmer, David C. [1 ]
Young Jr., Victor G. [1 ]
Campbell, Stephen A. [1 ]
Gladfelter, Wayne L. [1 ]
机构：
[1] Univ of Minnesota, Minneapolis, United States
来源：
Advanced Materials | 1998年 / 10卷 / 17期
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页码：220 / 222
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