EFFECTS OF DEPOSITION CONDITIONS ON PROPERTIES OF A-Si1 - xCx:H DIAGNOSED USING OPTICAL EMISSION SPECTROSCOPY.

被引：0
|
作者：
Yoshimoto, Masahiro [1 ]
Aizawa, Kouichi [1 ]
Fuyuki, Takashi [1 ]
Matsunami, Hiroyuki [1 ]
机构：
[1] Kyoto Univ, Kyoto, Jpn, Kyoto Univ, Kyoto, Jpn
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1986年 / 25卷 / 10期
关键词：
DEPOSITION CONDITIONS - HYDROGENATED AMORPHOUS SILICON CARBON ALLOY - OPTICAL EMISSION SPECTROSCOPY;
D O I：
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页码：1465 / 1469
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