Liquid phase deposition (LPD) of silicon oxide near room temperature

被引：0
|
作者：
Krampe, S.
Behammer, D.
Bosch, B.G.
Sorge, R.
机构：
来源：
|
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Room temperature fabrication of silicon nanocrystals by pulsed laser deposition
    Erika Biserni
    Alice Scarpellini
    Rosaria Brescia
    David Dellasega
    Andrea Li Bassi
    Paola Bruno
    Journal of Nanoparticle Research, 2014, 16
  • [42] Device quality SiO2 films by liquid phase deposition (LPD) at 48°C
    Manhas, M
    Pease, TJ
    Cross, R
    Bose, SC
    Oxley, DP
    De Souza, MM
    Narayanan, EMS
    SILICON MATERIALS-PROCESSING, CHARACTERIZATION AND RELIABILITY, 2002, 716 : 317 - 323
  • [43] Phase composition of gas sensitive thin films of tin oxide operating at near room temperature
    O. S. Mahdi
    I. V. Malyar
    A. M. Zakharevich
    A. V. Smirnov
    I. V. Sinev
    S. B. Venig
    Technical Physics Letters, 2017, 43 : 681 - 683
  • [44] Phase composition of gas sensitive thin films of tin oxide operating at near room temperature
    Mahdi, O. S.
    Malyar, I. V.
    Zakharevich, A. M.
    Smirnov, A. V.
    Sinev, I. V.
    Venig, S. B.
    TECHNICAL PHYSICS LETTERS, 2017, 43 (07) : 681 - 683
  • [45] Novel fabrication of highly crystallized nanoparticles in the confined system by the liquid phase deposition (LPD) method
    Nakata, Akiyoshi
    Mizuhata, Minoru
    Deki, Shigehito
    ELECTROCHIMICA ACTA, 2007, 53 (01) : 179 - 185
  • [46] Catalytic Oxidation of Ethane to Carboxylic Acids in the Liquid Phase at Near Room Temperature at Ambient Pressure
    Li, Yuting
    Tang, Yu
    Luan Nguyen
    Tao, Franklin Feng
    ACS SUSTAINABLE CHEMISTRY & ENGINEERING, 2019, 7 (05) : 4707 - +
  • [47] Liquid phase deposition film of tin oxide
    Tsukuma, K
    Akiyama, T
    Imai, H
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1997, 210 (01) : 48 - 54
  • [48] Emissivity measurement of silicon semiconductor wafer near room temperature
    Sugawara, H
    Ohkubo, T
    Fukushima, T
    Iuchi, T
    SICE 2003 ANNUAL CONFERENCE, VOLS 1-3, 2003, : 2201 - 2204
  • [49] Radiation thermometry of semitransparent silicon wafers near room temperature
    Iuchi, Tohru
    Ikeda, Yoshikazu
    THERMOSENSE XXVIII, 2006, 6205
  • [50] Polarized radiation thermometry of silicon wafers near room temperature
    Sugawara, H
    Iuchi, T
    SICE 2004 ANNUAL CONFERENCE, VOLS 1-3, 2004, : 646 - 649
12345