Simulation of sheath dynamics and current nonuniformity in plasma-immersion ion implantation of a patterned surface

被引：0
|
作者：
机构：
[1] Briehl, Boris
[2] Urbassek, Herbert M.
来源：
Briehl, B. (urbassek@rhrk.uni-kl.de) | 1600年 / American Institute of Physics Inc.卷 / 93期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
42
引用
收藏
相关论文
共 50 条
  • [21] Plasma-immersion ion implantation surface oxidation on a cobalt-chromium alloy for biomedical applications
    Catanio Bortolan, Carolina
    Paternoster, Carlo
    Turgeon, Stephane
    Paoletti, Chiara
    Cabibbo, Marcello
    Lecis, Nora
    Mantovani, Diego
    BIOINTERPHASES, 2020, 15 (04)
  • [22] Sheath dynamics in a cylindrical PET-film for plasma immersion ion implantation
    Li, Xue-Chun
    Tian, Li-Cheng
    Wang, You-Nian
    VACUUM, 2010, 84 (09) : 1118 - 1122
  • [23] Silicon Heterojunction Solar Cells Using AlOx and Plasma-Immersion Ion Implantation
    Lin, Yu-Hsien
    Wu, Yung-Chun
    You, Hsin-Chiang
    Chen, Chun-Hao
    Chen, Ping-Hua
    Tsai, Yi-He
    Yang, Yi-Yun
    Chang-Liao, K. S.
    ENERGIES, 2014, 7 (06) : 3653 - 3663
  • [24] Effects of nitrogen and argon plasma-immersion ion implantation on silicon and its oxidation
    Rajkumer
    Kumar, M
    George, PJ
    Mukherjee, S
    Chari, KS
    SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 253 - 257
  • [25] A ONE-DIMENSIONAL COLLISIONAL MODEL FOR PLASMA-IMMERSION ION-IMPLANTATION
    VAHEDI, V
    LIEBERMAN, MA
    ALVES, MV
    VERBONCOEUR, JP
    BIRDSALL, CK
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (04) : 2008 - 2014
  • [26] Modification of the Properties of Vanadium Oxide Thin Films by Plasma-Immersion Ion Implantation
    Burdyukh, Sergey
    Berezina, Olga
    Pergament, Alexander
    ADVANCES IN CONDENSED MATTER PHYSICS, 2018, 2018
  • [27] Effects of nitrogen and argon plasma-immersion ion implantation on silicon and its oxidation
    Rajkumer, R.
    Kumar, Mukesh
    George, P.J.
    Mukherjee, S.
    Chari, K.S.
    Surface and Coatings Technology, 2002, 156 (1-3) : 253 - 257
  • [28] COMPUTATIONAL SCHEME FOR SIMULATING PLASMA DYNAM-ICS DURING PLASMA-IMMERSION ION IMPLANTATION
    T. E. Sheridan Plasma Research Laboratory
    Acta Metallurgica Sinica(English Letters), 2000, (02) : 611 - 617
  • [29] Ion depletion effects in sheath dynamics during plasma immersion ion implantation-models and data
    Kellerman, PL
    Qin, S
    Bradley, MP
    Saadatmand, K
    REVIEW OF SCIENTIFIC INSTRUMENTS, 2002, 73 (02): : 837 - 839
  • [30] The microstructure of Si surface layers after plasma-immersion He+ ion implantation and subsequent thermal annealing
    Lomov, Andrey
    Shcherbachev, Kirill
    Chesnokov, Yurii
    Kiselev, Dmitry
    JOURNAL OF APPLIED CRYSTALLOGRAPHY, 2017, 50 : 539 - 546
12345