Measurement of the state of stress in silicon with micro-Raman spectroscopy

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[1] Harris, Stephen J.
[2] O'Neill, Ann E.
[3] Yang, Wen
[4] Gustafson, Peter
[5] Boileau, James
[6] Weber, W.H.
[7] Majumdar, Bhaskar
[8] Ghosh, Somnath
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Harris, S.J. (sharri42@ford.com) | 1600年 / American Institute of Physics Inc.卷 / 96期
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