Technology and properties of GaInAsSb layers grown on GaSb substrates

被引:0
|
作者
Piskorski, M. [1 ]
Papis, E. [1 ]
Golaszewska, K. [1 ]
Jung, W. [1 ]
Adamczewska, J. [1 ]
Perchuc, L. [1 ]
机构
[1] Inst of Electron Technology, Warszawa, Poland
来源
Electron Technology (Warsaw) | 2000年 / 33卷 / 03期
关键词
Carrier concentration - Composition - Liquid phase epitaxy - Microanalysis - Numerical analysis - Optical microscopy - Schottky barrier diodes - Semiconductor growth;
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学科分类号
摘要
The Ga1-xInxAsySb1-y layers were grown on GaSb substrates by the liquid phase epitaxy (LPE) technique. The materials were characterized by means of optical microscopy, X-ray high resolution diffractometry, electroprobe microanalysis (EPXMA) and numerical analysis of measured C-V characteristic of Schottky barrier junction Hg-GaInAsSb. The different compositions of Ga1-xInxAsySb1-y compounds lattice matched to GaSb substrates with x value changing from 0.021 to 0.23, were established. Applying of sulfidation technique to the substrate's surface before growth, improved layer's quality. n-type layers, with carrier concentration below 3.1015cm-3 have been grown.
引用
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页码:393 / 399
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