PREPARATION AND PROPERTIES OF a-Si:H/a-SiNx:H SUPERLATTICE FILMS.

被引：0
|
作者：
Wang, Zhichao [1 ]
Liu, Xiangna [1 ]
He, Yuliang [1 ]
Wu, Rulin [1 ]
机构：
[1] Nanjing Univ, China, Nanjing Univ, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 1987年 / 8卷 / 01期
关键词：
CRYSTALS - SEMICONDUCTING SILICON COMPOUNDS;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
The preparation method, structure and optical quantum size effect of a-Si:H/a-SiN//x: H superlattice films are reported.
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页码：94 / 98
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