ION IMPLANTATION INTO NON-PLANAR TARGETS: MONTE CARLO SIMULATIONS AND ANALYTICAL MODELS.

被引：0
|
作者：
Ryssel, Heiner [1 ]
Lorenz, Juergen [1 ]
Krueger, Wolfgang [1 ]
机构：
[1] Fraunhofer-Arbeitsgruppe fuer, Integrierte Schaltungen, Erlangen,, West Ger, Fraunhofer-Arbeitsgruppe fuer Integrierte Schaltungen, Erlangen, West Ger
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1986年 / B19-20卷
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页码：45 / 49
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