Plasma etching and plasma physics experiments for the undergraduate microelectronics course

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作者：
Univ of New Mexico, Albuquerque, United States [1 ]
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来源：
IEEE Trans Educ | / 3卷 / [d]207-212期
基金：
美国国家科学基金会;
关键词：
Education - Engineering education - Integrated circuit manufacture - Semiconductor device manufacture - Teaching;
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