共 50 条
- [22] PROPERTIES OF ALUMINUM NITRIDE FILMS BY AN ION-BEAM AND VAPOR-DEPOSITION METHOD NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1989, 39 (1-4): : 178 - 181
- [23] Structural analysis of a carbon nitride film prepared by ion-beam-assisted deposition Japanese Journal of Applied Physics, Part 2: Letters, 1999, 38 (4 A):
- [24] Structural analysis of a carbon nitride film prepared by ion-beam-assisted deposition JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS, 1999, 38 (4A): : L395 - L397
- [26] Plasma-enhanced chemical vapor deposition of nitrogen-rich silicon oxynitride thin film for gate insulator application Proceedings of SPIE - The International Society for Optical Engineering, 1994, 2364 : 470 - 473
- [29] TITANIUM NITRIDE FILM FORMATION BY THE DYNAMIC ION-BEAM MIXING METHOD NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1993, 80-1 : 1402 - 1405