Photothermal ionization spectroscopy for shallow impurities in ultra-pure silicon

被引:0
|
作者
机构
[1] Shen, S.C.
[2] Yu, Z.Y.
[3] Huang, Y.X.
来源
Shen, S.C. | 1600年 / 11期
关键词
Semiconducting Silicon;
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [1] PHOTOTHERMAL IONIZATION SPECTROSCOPY FOR SHALLOW IMPURITIES IN ULTRA-PURE SILICON
    SHEN, SC
    YU, ZY
    HUANG, YX
    INTERNATIONAL JOURNAL OF INFRARED AND MILLIMETER WAVES, 1990, 11 (05): : 595 - 630
  • [2] HIGH-RESOLUTION PHOTOTHERMAL IONIZATION SPECTROSCOPY ON ULTRA-PURE SEMICONDUCTORS
    俞志毅
    黄叶肖
    朱景兵
    陆卫
    沈学础
    Eugene E.Haller
    ChineseScienceBulletin, 1990, (13) : 1076 - 1080
  • [3] HIGH-RESOLUTION PHOTOTHERMAL IONIZATION SPECTROSCOPY ON ULTRA-PURE SEMICONDUCTORS
    YU, ZY
    HUANG, YX
    ZHU, JB
    LU, W
    SHEN, XC
    CHINESE SCIENCE BULLETIN, 1990, 35 (13): : 1076 - 1080
  • [4] ANALYSIS OF PHOTOTHERMAL IONIZATION SPECTRA OF SHALLOW IMPURITIES IN SILICON
    BAMBAKIDIS, G
    BROWN, GJ
    PHYSICAL REVIEW B, 1986, 33 (12): : 8180 - 8187
  • [6] ELECTRICAL TRANSPORT ANALYSIS OF ULTRA-PURE SILICON
    PETERSON, TL
    SZMULOWICZ, F
    HEMENGER, PM
    JOURNAL OF CRYSTAL GROWTH, 1990, 106 (01) : 16 - 33
  • [7] ULTRA-PURE WATER FOR THE SILICON CHIP INDUSTRY
    MCCARTNEY, B
    CHEMICAL ENGINEER-LONDON, 1987, (432): : 24 - 26
  • [8] HIGH-RESOLUTION FOURIER-TRANSFORM SPECTROSCOPY OF SHALLOW ACCEPTORS IN ULTRA-PURE GERMANIUM
    HALLER, EE
    HANSEN, WL
    SOLID STATE COMMUNICATIONS, 1974, 15 (04) : 687 - 692
  • [9] PHOTOTHERMAL IONIZATION SPECTROSCOPY OF OXYGEN-RELATED SHALLOW DEFECTS IN CRYSTALLINE SILICON
    GRIFFIN, JA
    HARTUNG, J
    WEBER, J
    NAVARRO, H
    GENZEL, L
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1989, 48 (01): : 41 - 47
  • [10] Ultra-pure crystallisation
    Spear, Mike
    Process Engineering (London), 2003, 84 (03):