A Design Flow for Micromachined Electromechanical Systems

被引：0
|
作者：
Swart, Nicholas R. [1 ,2 ]
机构：
[1] National Optics Institute, Sainte-Foy, Que., Canada
[2] Analog Devices, 21 Osborn St., Cambridge, MA 02139-3556, United States
来源：
IEEE Design and Test of Computers | / 16卷 / 04期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：39 / 47
相关论文
共 50 条
  • [31] Structure design with sensitivity control performance limitation for electromechanical systems
    Shirao, Junichi
    Imai, Jun
    Konishi, Masami
    2006 SICE-ICASE INTERNATIONAL JOINT CONFERENCE, VOLS 1-13, 2006, : 5295 - +
  • [32] Study on the fundamental design issues of micro electromechanical systems (MEMS)
    Wen, Shizhu
    Ding, Jianning
    Jixie Gongcheng Xuebao/Chinese Journal of Mechanical Engineering, 2000, 36 (07): : 39 - 42
  • [33] Design concepts of adaptive electromechanical control systems with reference models
    Dadenkov D.A.
    Kazantsev V.P.
    Lyakhomskii A.V.
    Russian Electrical Engineering, 2015, 86 (6) : 350 - 355
  • [34] Investigation and Application on Overall Design Method of Complex Electromechanical Systems
    Yang S.
    Li W.
    Shao Z.
    Zhongguo Jixie Gongcheng/China Mechanical Engineering, 2023, 34 (01): : 47 - 54
  • [35] Calculation and measurement of electromechanical coupling coefficient of capacitive micromachined ultrasonic transducers
    Yaralioglu, GG
    Ergun, AS
    Bayram, B
    Haeggström, E
    Khuri-Yakub, BT
    IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 2003, 50 (04) : 449 - 456
  • [36] Electromechanical analysis of a micromachined comb-drive actuator by admittance measurement
    Faculty of Engineering, Kagawa University, 2217-20 Hayashi-cho, Takamatsu 761-0396
    不详
    不详
    不详
    不详
    不详
    不详
    不详
    不详
    不详
    不详
    IEEJ Trans. Sens. Micromach., 2006, 7 (281-285):
  • [37] Improved coupled-field FE analysis of micromachined electromechanical transducers
    Wibbeler, J
    Scheibner, D
    Mehner, J
    TRANSDUCERS '01: EUROSENSORS XV, DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2, 2001, : 240 - 243
  • [38] Flow measurement in micromachined orifices
    Schmidt, HJ
    Holtkamp, F
    Benecke, W
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 1997, 7 (03) : 189 - 192
  • [39] Silicon bulk micromachined electromechanical switches with four cantilever piezoelectric actuators
    Park, Jae Yoeng
    Lee, Hee Chul
    Yang, Chang Soo
    MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, 2007, 49 (03) : 570 - 573
  • [40] Micromachined flow sensors - a review
    Nguyen, NT
    FLOW MEASUREMENT AND INSTRUMENTATION, 1997, 8 (01) : 7 - 16
12345