Applications of geometrical optical stylus technologies in surface topography measurement

被引：0
|
作者：
Yang, Chunlan
Pu, Zhaobang
Zhao, Hui
机构：
来源：
Jiguang Zazhi/Laser Journal | 2000年 / 21卷 / 06期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：1 / 4
相关论文
共 50 条
  • [31] Role of optical measurement systems in analysing the surface topography of an industry standard component
    Walczak, D.
    Krolczyk, J. B.
    Chudy, R.
    Gupta, Munish Kumar
    Pruncu, C.
    Krolczyk, G. M.
    OPTIK, 2023, 283
  • [32] IMPORTANCE OF CHECKING THE STYLUS RADIUS IN THE MEASUREMENT OF SURFACE-ROUGHNESS
    ELEWA, I
    KOURA, MM
    WEAR, 1986, 109 (1-4) : 401 - 410
  • [33] Comparison of surface texture measurement by stylus and fiber optic transducers
    Scott, W
    Donovan, A
    JOURNAL OF TESTING AND EVALUATION, 1998, 26 (01) : 70 - 78
  • [34] NANO-CALIBRATION FOR STYLUS-BASED SURFACE MEASUREMENT
    WHITEHOUSE, DJ
    BOWEN, DK
    CHETWYND, DG
    DAVIES, ST
    JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1988, 21 (01): : 46 - 51
  • [35] Dynamic modelling of the fidelity of random surface measurement by the stylus method
    Tian, Y.
    Liu, X.
    Zhang, D.
    Chetwynd, D. G.
    WEAR, 2009, 266 (5-6) : 555 - 559
  • [36] In-situ measurement of grinding wheel surface topography (1st report) - Development of measuring system using laser stylus
    Kakino, Y
    Matsubara, A
    Yamaji, I
    Matuda, K
    Nakagawa, H
    Hirogaki, T
    Kita, Y
    INTERNATIONAL JOURNAL OF THE JAPAN SOCIETY FOR PRECISION ENGINEERING, 1997, 31 (04): : 273 - 277
  • [37] Optical topography measurement of patterned wafers
    de Lega, XC
    de Groot, P
    Characterization and Metrology for ULSI Technology 2005, 2005, 788 : 432 - 436
  • [38] MEASUREMENT OF SURFACE-ROUGHNESS - COMPARISON BETWEEN A DEFECT-OF-FOCUS OPTICAL TECHNIQUE AND THE CLASSICAL STYLUS TECHNIQUE
    MIGNOT, J
    GORECKI, C
    WEAR, 1983, 87 (01) : 39 - 49
  • [39] APPLICATIONS FOR A WIDE-RANGE STYLUS INSTRUMENT IN SURFACE METROLOGY
    GARRATT, JD
    WEAR, 1982, 83 (01) : 13 - 23
  • [40] Development of an optical stylus displacement sensor for surface profiling instruments
    Hiroya Fukatsu
    Kazuhisa Yanagi
    Microsystem Technologies, 2005, 11 : 582 - 589
12345