Surface and interface analysis by nonresonant multiphoton ionization of sputtered neutrals

被引：0
|
作者：
Pallix, Joan B. [1 ]
Gillen, Keith T. [1 ]
Becker, Christopher H. [1 ]
机构：
[1] SRI Int, United States
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1988年 / B33卷 / 1-4期
关键词：
Financial support from NSF; Division of Materials Research and Perkin-Elmer Corporation; Physical Electronics Division is gratefully acknowledged. The authors thank N. Newman of Stanford for supplying the Ag/GaAs sample; and P. Wright of Stanford for supplying the F implanted silicon structure;
D O I：
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学科分类号：
摘要：
30
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页码：912 / 917
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