Phosphorus diffusion into silicon from a spin-on source using rapid thermal processing

被引：0
|
作者：
机构：
来源：
| 1600年 / 71期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [31] INVESTIGATION OF FACTORS AFFECTING DOPING UNIFORMITY USING A SPIN-ON BOROSILICA DIFFUSION SOURCE
    SYKES, SP
    MAR, KM
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1976, 123 (08) : C272 - C272
  • [32] DIFFUSION OF PHOSPHORUS INTO SILICON USING PHOSPHINE GAS AS A SOURCE
    GHOSHDASTIDAR, SN
    SOLID STATE TECHNOLOGY, 1975, 18 (11) : 37 - &
  • [33] The characteristics of Zn-doped InP using spin-on dopant as a diffusion source
    K. H. Yoon
    Y. H. Lee
    D. H. Yeo
    S. J. Kim
    Journal of Electronic Materials, 2002, 31 : 244 - 247
  • [34] The characteristics of Zn-doped InP using spin-on dopant as a diffusion source
    Yoon, KH
    Lee, YH
    Yeo, DH
    Kim, SJ
    JOURNAL OF ELECTRONIC MATERIALS, 2002, 31 (04) : 244 - 247
  • [35] DOPING OF SILICON WITH ARSENIC AND PHOSPHORUS FROM SPIN-ON SOURCES EXPOSED TO INCOHERENT-LIGHT
    LARSEN, AN
    BORISENKO, VE
    NIELSEN, LD
    JOURNAL DE PHYSIQUE, 1983, 44 (NC-5): : 427 - 431
  • [36] RAPID THERMAL-DIFFUSION OF ALUMINUM IN SILICON AND ITS INTERACTION WITH PHOSPHORUS
    NAGEL, D
    FROHNE, C
    SITTIG, R
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1995, 60 (01): : 61 - 65
  • [37] IMPROVED SHALLOW P+ DIFFUSION INTO INGAASP BY A NEW SPIN-ON DIFFUSION SOURCE
    AMANN, MC
    FRANZ, G
    JOURNAL OF APPLIED PHYSICS, 1987, 62 (04) : 1541 - 1543
  • [38] Fabrication and characterization of GaSb based thermophotovoltaic cells using Zn diffusion from a doped spin-on glass source
    S. Dakshinamurthy
    S. Shetty
    I. Bhat
    C. Hitchcock
    R. Gutmann
    G. Charache
    M. Freeman
    Journal of Electronic Materials, 1999, 28 : 355 - 359
  • [39] DIFFUSION OF PHOSPHORUS INTO SILICON USING PHOSPHINE GAS AS A SOURCE.
    Ghosh Dastidar, S.N.
    1600, (18):
  • [40] Fabrication and characterization of GaSb based thermophotovoltaic cells using Zn diffusion from a doped spin-on glass source
    Dakshinamurthy, S
    Shetty, S
    Bhat, I
    Hitchcock, C
    Gutmann, R
    Charache, G
    Freeman, M
    JOURNAL OF ELECTRONIC MATERIALS, 1999, 28 (04) : 355 - 359
12345