Silicon wafer direct bonding without hydrophilic native oxides

被引：0
|
作者：
Himi, Hiroaki [1 ]
Matsui, Masaki [1 ]
Fujino, Seiji [1 ]
Hattori, Tadashi [1 ]
机构：
[1] Nippondenso Co., Ltd, Aichi, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 1 A期
关键词：
18;
D O I：
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摘要：
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页码：6 / 10
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