Development of a diffractive optical element for laser processing

被引：0
|
作者：
Kurisu, Kenichi
Hirai, Takayuki
Fuse, Keiji
Okada, Takeshi
Ebata, Keiji
Ikegaya, Akihiko
Tatsumi, Masami
机构：
来源：
SEI Technical Review | 2002年 / 53期
关键词：
Beam homogenizing - Beam shaping - Beam splitting - Diffractive optical element - Fourier optical analysis - Hydrogen selenide - Zinc selenide;
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学科分类号：
摘要：
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页码：86 / 91
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