Effects of gradient interlayer on residual stress and cracking in TiN thin films

被引：0
|
作者：
Qi, Xuan [1 ]
Li, Ge-Yang [1 ]
Shi, Xiao-Rong [1 ]
Lu, Xia [1 ]
Li, Peng-Xing [1 ]
机构：
[1] Sch. of Mat. Sci. and Eng., Shanghai Jiaotong Univ., Shanghai 200030, China
来源：
Transactions of Nonferrous Metals Society of China (English Edition) | 2000年 / 10卷 / 03期
关键词：
Gradient interlayer - Grazing method - Titanium nitride thin film;
D O I：
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学科分类号：
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页码：294 / 297
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