Preparation of lead zirconate titanate thin films by reactive evaporation

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作者
Torii, Kazuyoshi [1 ]
Saitoh, Sakae [1 ]
Ohji, Yuzuru [1 ]
机构
[1] Hitachi, Ltd, Tokyo, Japan
关键词
Lead zirconate titanate - Reactive evaporation;
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页码:5287 / 5290
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