Plasma-Chemical Etching of InP with Trichloro-Trifluoroethane.

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作者：
Novikova, E.M.
Kuznetsov, G.D.
Ershova, S.A.
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Neorganiceskie materialy | 1986年 / 22卷 / 11期
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页码：1769 / 1772
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