Optical and mechanical properties of Cr and CrNx films by dc magnetron sputtering

被引：0
|
作者：
Ando, E. [1 ]
Suzuki, S. [1 ]
机构：
[1] Asahi Glass Co, Ltd, Ibaraki, Japan
来源：
Journal of Non-Crystalline Solids | 1997年 / 218卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
16
引用
收藏
页码：68 / 73
相关论文
共 50 条
  • [21] Optical properties of ZnO thin films deposited by dc reactive magnetron sputtering
    Meng, Li-Jian
    Andritschky, M.
    dos Santos, M.P.
    Vacuum, 1993, 44 (02): : 105 - 109
  • [22] Composition, microstructure, and properties of CrNx films deposited using medium frequency magnetron sputtering
    Kong, Qinghua
    Ji, Li
    Li, Hongxuan
    Liu, Xiaohong
    Wang, Yongjun
    Chen, Jianmin
    Zhou, Huidi
    APPLIED SURFACE SCIENCE, 2011, 257 (06) : 2269 - 2274
  • [23] Properties of CdTe Films Prepared By DC Magnetron Sputtering
    Kirichenko, M., V
    Zaitsev, R., V
    Dobrozhan, A., I
    Khrypunov, G. S.
    Kharchenko, M. M.
    2017 IEEE FIRST UKRAINE CONFERENCE ON ELECTRICAL AND COMPUTER ENGINEERING (UKRCON), 2017, : 355 - 359
  • [24] The microstructure and mechanical properties of Ti(CoCr)N films produced by DC magnetron sputtering
    Li, Y. T.
    Deng, Q. Y.
    Liu, H. Y.
    Leng, Y. X.
    Huang, N.
    INTERNATIONAL JOURNAL OF MODERN PHYSICS B, 2019, 33 (32):
  • [25] Mechanical and tribological properties of a-GeCx films deposited by dc-magnetron sputtering
    Jacobsohn, LG
    Reigada, DC
    Freire, FL
    Prioli, R
    Zanette, SI
    Caride, AO
    Nascimento, FC
    Lepienski, CM
    THIN-FILMS - STRESSES AND MECHANICAL PROPERTIES VII, 1998, 505 : 351 - 356
  • [26] Microstructure and mechanical properties of carbon nitride multilayer films deposited by DC magnetron sputtering
    Liu, D. G.
    Tu, J. P.
    Zhang, H.
    Chen, R.
    Gu, C. D.
    SURFACE & COATINGS TECHNOLOGY, 2011, 205 (8-9): : 3080 - 3086
  • [27] Microstructure, mechanical and tribological properties of TiCN nanocomposite films deposited by DC magnetron sputtering
    Chen, R.
    Tu, J. P.
    Liu, D. G.
    Mai, Y. J.
    Gu, C. D.
    SURFACE & COATINGS TECHNOLOGY, 2011, 205 (21-22): : 5228 - 5234
  • [28] OPTICAL-PROPERTIES OF ZNO - AL FILMS PREPARED BY REACTIVE DC MAGNETRON SPUTTERING
    GHOSH, S
    SARKAR, A
    CHAUDHURI, S
    PAL, AK
    VACUUM, 1991, 42 (10-11) : 645 - 648
  • [29] Microstructural and optical properties of ZnO/(Ni) thin films prepared by DC magnetron sputtering
    Gao, Fei
    Tan, Li Xin
    Wu, Zai Hua
    Liu, Xiao Yan
    JOURNAL OF ALLOYS AND COMPOUNDS, 2009, 484 (1-2) : 489 - 493
  • [30] The electronic and optical properties of IZO thin films prepared by pulsed DC magnetron sputtering
    Kim, S. T.
    Lee, J. H.
    Yang, J. Y.
    Ryu, S. W.
    Hong, J. S.
    Hong, W. P.
    Kim, J. J.
    Kim, H. M.
    Yang, J. M.
    Park, S. H.
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2007, 50 (03) : 662 - 665
12345