Optical and mechanical properties of Cr and CrNx films by dc magnetron sputtering

被引：0
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作者：
Ando, E. [1 ]
Suzuki, S. [1 ]
机构：
[1] Asahi Glass Co, Ltd, Ibaraki, Japan
来源：
Journal of Non-Crystalline Solids | 1997年 / 218卷
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摘要：
16
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页码：68 / 73
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