LINEWIDTH MEASUREMENT ON IC MASKS BY DIFFRACTION FROM GRATING TEST PATTERNS.

被引：0
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作者：
BOSENBERG, WOLFRAM A.
KLEINKNECHT, HANS P.
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来源：
| 1982年 / V 25卷 / N 10期
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Compendex;
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摘要：
INTEGRATED CIRCUITS - MASKS
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页码：110 / 115
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