LINEWIDTH MEASUREMENT ON IC MASKS BY DIFFRACTION FROM GRATING TEST PATTERNS.

被引：0
|
作者：
BOSENBERG, WOLFRAM A.
KLEINKNECHT, HANS P.
机构：
来源：
| 1982年 / V 25卷 / N 10期
关键词：
Compendex;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
INTEGRATED CIRCUITS - MASKS
引用
收藏
页码：110 / 115
相关论文
共 27 条
  • [1] LINEWIDTH MEASUREMENT ON IC MASKS BY DIFFRACTION FROM GRATING TEST PATTERNS
    BOSENBERG, WA
    KLEINKNECHT, HP
    SOLID STATE TECHNOLOGY, 1982, 25 (10) : 110 - 115
  • [2] LINEWIDTH MEASUREMENT ON IC MASKS AND WAFERS BY GRATING TEST PATTERNS
    KLEINKNECHT, HP
    MEIER, H
    APPLIED OPTICS, 1980, 19 (04): : 525 - 533
  • [3] LINEWIDTH MEASUREMENT ON IC WAFERS BY DIFFRACTION FROM GRATING TEST PATTERNS
    BOSENBERG, WA
    KLEINKNECHT, HP
    SOLID STATE TECHNOLOGY, 1983, 26 (07) : 79 - 85
  • [4] Diffraction of atoms from a measurement induced grating
    Kunze, S
    Dieckmann, K
    Rempe, G
    PHYSICAL REVIEW LETTERS, 1997, 78 (11) : 2038 - 2041
  • [5] Resolved diffraction patterns from a reflection grating for atoms
    Estève, J
    Stevens, D
    Savalli, V
    Westbrook, N
    Westbrook, CI
    Aspect, A
    JOURNAL OF OPTICS B-QUANTUM AND SEMICLASSICAL OPTICS, 2003, 5 (02) : S103 - S106
  • [6] The estimation of cold-work from X-ray diffraction patterns.
    Frommer, L
    JOURNAL OF THE INSTITUTE OF METALS, 1939, 64 : 285 - 298
  • [7] Diffraction patterns from holographic masks generated using combined axicon and helical phase distributions
    Mihailescu, M.
    Preda, L.
    Kusko, C.
    Scarlat, E. I.
    ADVANCED TOPICS IN OPTOELECTRONICS, MICROELECTRONICS, AND NANOTECHNOLOGIES VII, 2015, 9258
  • [8] Lattice constant measurement from electron backscatter diffraction patterns
    Saowadee, N.
    Agersted, K.
    Bowen, J. R.
    JOURNAL OF MICROSCOPY, 2017, 266 (02) : 200 - 210
  • [9] ONLINE MEASUREMENT OF SARCOMERE LENGTH FROM DIFFRACTION PATTERNS IN MUSCLE
    IWAZUMI, T
    POLLACK, GH
    IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1979, 26 (02) : 86 - 93
  • [10] Dynamical inversion using projection onto non-convex sets: Crystal structures from diffraction patterns.
    Spence, JCH
    Zuo, JM
    Calef, B
    ELECTRON MICROSCOPY 1998, VOL 1: GENERAL INTEREST AND INSTRUMENTATION, 1998, : 427 - 428
123