RECENT ADVANCES - SOLID STATE GAS DETECTION RECENT ADVANCES IN THIN SOLID FILMS FOR SOLID STATE GAS DETECTION.

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作者：
Leary, D.J.
Jordan, A.G.
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Preprints - Tribology Conference | 1978年
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摘要：
Several materials systems have shown promise as thin films for solid state gas detection when incorporated in integrated devices using standard planar processing techniques. Recent developments in thin film metal-oxide semiconductors (ZnO) sensitive to CO and O//2, hydrogen and H//2S sensitive metal-gate MOS structures, and an organic thin film (phthalocyamine) sensitive to NO//2 are discussed.
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页码：233 / 251
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