Principle and Application of Clean Room Technology.

被引:0
|
作者
Chabicovsky, R.
Reinagl, H.
机构
来源
关键词
AIR FILTERS - DUST ABATEMENT - VENTILATION;
D O I
暂无
中图分类号
学科分类号
摘要
12 refs. In German.
引用
收藏
页码:46 / 52
相关论文
共 50 条
  • [31] Controlling contamination: the origins of clean room technology
    Holbrook, Daniel
    HISTORY AND TECHNOLOGY, 2009, 25 (03) : 173 - 191
  • [32] Challenges of clean/strip processing for Cu/Low-k technology.
    Baklanov, MR
    Le, QT
    Kesters, E
    Iacopi, F
    Van Aelst, J
    Struyf, H
    Boullart, W
    Vanhaelemeersch, S
    Maex, K
    PROCEEDINGS OF THE IEEE 2004 INTERNATIONAL INTERCONNECT TECHNOLOGY CONFERENCE, 2004, : 187 - 189
  • [33] Clean coal conversion options using Fischer-Tropsch technology.
    Steynherg, AP
    Nel, HG
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2003, 225 : U877 - U877
  • [34] The application of short electromagnetic waves in radio technology.
    Kollatz, CW
    Noack, F
    ZEITSCHRIFT DES VEREINES DEUTSCHER INGENIEURE, 1928, 72 : 913 - 916
  • [35] Physics and application of luminescent materials in the light technology.
    Frerichs, R
    NATURWISSENSCHAFTEN, 1938, 26 : 681 - 687
  • [36] CERAMICS TECHNOLOGY. APPLICATION TO ENGINE COMPONENTS.
    Parker, D.A.
    Industrial Lubrication and Tribology, 1985, 37 (06) : 204 - 210
  • [37] Examples of the Application of PUR Systems in Offshore Technology.
    Peters, R.
    Gummi, Fasern, Kunststoffe, 1985, 38 (11): : 586 - 588
  • [38] APPLICATION OF MICROELECTRONICS TO REFRIGERATION AND HEAT PUMP TECHNOLOGY.
    Nowotny, S.
    Australian refrigeration, Air conditioning and heating, 1986, 40 (02): : 34 - 35
  • [39] Elements of clean-room technology and contamination control
    Kapoor, JC
    Gupta, M
    DEFENCE SCIENCE JOURNAL, 2003, 53 (03) : 249 - 258
  • [40] CLEAN ROOM TECHNOLOGY AND ASEPTIC PRACTICES IN THE SURGICAL SUITE
    BELKIN, NL
    JOURNAL OF ENVIRONMENTAL SCIENCES, 1984, 27 (03): : 30 - 32