共 50 条
- [22] Ion sources for ion beam assisted thin film deposition ION-SOLID INTERACTIONS FOR MATERIALS MODIFICATION AND PROCESSING, 1996, 396 : 635 - 640
- [24] EFFECT OF MIXED ARGON AND NITROGEN ION-BEAM ON CUBIC BORON-NITRIDE FILM FORMATION IN ION-BEAM-ASSISTED DEPOSITION JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1995, 34 (10): : 5758 - 5762
- [25] Study of Ti(C,N) film formed by ion beam assisted deposition SMART MATERIALS TECHNOLOGIES: SMART STRUCTURES AND MATERIALS 1997, 1997, 3040 : 291 - 293
- [26] Characterization and tribological properties of Cr-N films by ion beam enhanced deposition Mocaxue Xuebao/Tribology, 1998, 18 (02): : 113 - 118
- [27] MONTE-CARLO STUDY OF REACTIVE ION-BEAM-ASSISTED FILM GROWTH APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1993, 56 (06): : 561 - 565
- [28] CHEMICAL AND THERMODYNAMIC INFLUENCES IN ION-BEAM-ASSISTED THIN-FILM SYNTHESIS NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 84 (02): : 181 - 185
- [29] Thin-film waveguides of zirconium oxyfluoride with variable refractive index produced by ion-beam-assisted deposition Optics Letters, 1995, 20 (21):
- [30] EFFECT OF N-2(+) ION-BOMBARDMENT ON THE COMPOSITIONAL CHANGE AND RESIDUAL-STRESS OF ALN FILM SYNTHESIZED BY ION-BEAM-ASSISTED DEPOSITION JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1995, 13 (06): : 2814 - 2818