Adsorption and decomposition of organometallics on GaAs surfaces in low-pressure metalorganic chemical vapor deposition

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作者：
Sato, Michio [1 ]
Weyers, Markus [1 ]
机构：
[1] NTT Basic Research Lab, Tokyo, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1991年 / 30卷 / 11 B期
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