QUANTITATIVE ANALYSIS BY AUGER ELECTRON SPECTROSCOPY.

被引：0

作者：

Shimizu, Ryuichi

机构：

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes | 1983年 / 22卷 / 11期

关键词：

SURFACES - Spectroscopic Analysis;

D O I：

10.1143/jjap.22.1631

中图分类号：

学科分类号：

摘要：

A review is presented of the physical model of quantitative Auger analysis. The authors also propose standard quantitative correction procedure based on a combination of M. P. Seah & W. A. Dench's IMFP-data and R. Shimizu & S. Ichimura's backscattering factors, by providing functional representations of the backscattering factors. It is hoped that this will lead to more comprehensive and accurate quantitative Auger analysis. This will enable the accuracy of quantitative analysis to be improved and make the comparison of results derived by different workers more meaningful.

引用

页码：1631 / 1642

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