New linewidth measurement system using environmental scanning electron microscope technology

被引：0
|
作者：
Yamaguchi, Takeshi [1 ]
Kawata, Shintaro [1 ]
Suzuki, Shohei [1 ]
Sato, Tatsuo [1 ]
Sato, Yu [1 ]
机构：
[1] Nikon Corp, Tokyo, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1993年 / 32卷 / 12 B期
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页码：6277 / 6280
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