Balanced inductive plasma sources

被引：0
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作者：
Vinogradov, Georgy K. [1 ]
Yoneyama, Shimao [1 ]
机构：
[1] MC Electronics Co Ltd, Yamanashi, Japan
来源：
Japanese Journal of Applied Physics, Part 2: Letters | 1996年 / 35卷 / 9 A期
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