FIB voltage contrast measurement for enhanced circuit repairs

被引：0
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作者：
Desplats, Romain [1 ]
Benteo, Bruno [1 ]
Perdu, Philippe [1 ]
机构：
[1] CNES-SOREP Laboratory, 18 avenue Edouard BELIN, 31401 Toulouse Cedex 4, France
来源：
Microelectronics Reliability | / 39卷 / 6-7期
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页码：1003 / 1008
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