Application of neural networks to plasma etch end point detection

被引：0
|
作者：
机构：
来源：
J Vac Sci Technol B | / 1卷 / 498期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [21] Application of neural networks to mathematical modeling of toroidal plasma
    Zaitsev, FS
    Lukianitsa, AA
    Shishkin, AG
    DOKLADY MATHEMATICS, 2003, 68 (03) : 471 - 473
  • [22] Origin of electrical signals for plasma etching end point detection: Comparison of end point signals and electron density
    Sobolewski, Mark A.
    Lahr, David L.
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2012, 30 (05):
  • [23] StickyLocalization: Robust End-To-End Relocalization on Point Clouds using Graph Neural Networks
    Fischer, Kai
    Simon, Martin
    Milz, Stefan
    Mader, Patrick
    2022 IEEE WINTER CONFERENCE ON APPLICATIONS OF COMPUTER VISION (WACV 2022), 2022, : 307 - 316
  • [24] StickyLocalization: Robust End-To-End Relocalization on Point Clouds using Graph Neural Networks
    Fischer, Kai
    Simon, Martin
    Milz, Stefan
    Mader, Patrick
    Proceedings - 2022 IEEE/CVF Winter Conference on Applications of Computer Vision, WACV 2022, 2022, : 307 - 316
  • [25] End-point detection method in etch-back planarization process for Josephson integrated circuits
    Inoue, Takashi, 1600, (30):
  • [26] Design of Artificial Neural Networks for Change-Point Detection
    Neuner, H.
    1ST INTERNATIONAL WORKSHOP ON THE QUALITY OF GEODETIC OBSERVATION AND MONITORING SYSTEMS (QUGOMS'11), 2015, 140 : 139 - 144
  • [27] A Differentiable Point Process with Its Application to Spiking Neural Networks
    Kajino, Hiroshi
    INTERNATIONAL CONFERENCE ON MACHINE LEARNING, VOL 139, 2021, 139
  • [28] Etch end-point detection of GaN-based devices using optical emission spectroscopy
    Kim, HS
    Sung, YJ
    Kim, DW
    Kim, T
    Dawson, MD
    Yeom, GY
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2001, 82 (1-3): : 159 - 162
  • [29] End-to-end Convolutional Neural Networks for Sound Event Detection in Urban Environments
    Zinemanas, Pablo
    Cancela, Pablo
    Rocamora, Martin
    PROCEEDINGS OF THE 24TH CONFERENCE OF OPEN INNOVATIONS ASSOCIATION (FRUCT), 2019, : 533 - 539
  • [30] An End-to-End Approach for Seam Carving Detection Using Deep Neural Networks
    Moreira, Thierry P.
    Santana, Marcos Cleison S.
    Passos, Leandro A.
    Papa, Joao Paulo
    da Costa, Kelton Augusto P.
    PATTERN RECOGNITION AND IMAGE ANALYSIS (IBPRIA 2022), 2022, 13256 : 447 - 457
12345