Concept of a Deflection-Focusing System in Electron Optics.

被引：0
|
作者：
De Chambost, E.
机构：
来源：
| 1978年 / 10卷 / 04期
关键词：
ELECTRON BEAMS - Focusing;
D O I：
暂无
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
In electron beam microlithography, a magnetic lens and deflection system should allow the beam to be scanned over as wide a field as possible with minimum aberration. A study was carried out to optimize the principal parameters of the system.
引用
收藏
页码：757 / 774
相关论文
共 50 条
  • [41] A TRAVELING-WAVE ELECTRON DEFLECTION SYSTEM
    HONEY, RC
    PROCEEDINGS OF THE INSTITUTE OF RADIO ENGINEERS, 1954, 42 (08): : 1329 - 1329
  • [42] A Theory of Relativistic Asymptotic Aberrations of a Combined Focusing-Deflection System
    李钰
    Science China Mathematics, 1993, (08) : 957 - 968
  • [43] CHROMATIC ABERRATION IN A DEFLECTION SYSTEM FOR A PRISM MASS SPECTROMETER WITH ENERGY FOCUSING
    KELMAN, VM
    RODNIKOV.IV
    YAKUSHEV, EM
    SOVIET PHYSICS TECHNICAL PHYSICS-USSR, 1971, 15 (07): : 1113 - &
  • [44] A THEORY OF RELATIVISTIC ASYMPTOTIC ABERRATIONS OF A COMBINED FOCUSING-DEFLECTION SYSTEM
    LI, Y
    SCIENCE IN CHINA SERIES A-MATHEMATICS PHYSICS ASTRONOMY, 1993, 36 (08): : 957 - 968
  • [45] A novel combined focusing-deflection system for streak image tube
    Kang, Yifan
    Feng, Dayi
    Zhou, Libin
    Wang, Chao
    Tian, Xiaona
    Tian, Jinshou
    Liu, Hulin
    Tang, Tiantong
    Qiangjiguang Yu Lizishu/High Power Laser and Particle Beams, 2009, 21 (07): : 993 - 997
  • [46] ELECTRON OPTICS OF AN ELECTRON-BEAM LITHOGRAPHIC SYSTEM
    MAUER, JL
    PFEIFFER, HC
    STICKEL, W
    IBM JOURNAL OF RESEARCH AND DEVELOPMENT, 1977, 21 (06) : 514 - 521
  • [47] Coincidence imaging system with electron optics
    Kroupa, Martin
    Jakubek, Jan
    Krejci, Frantisek
    Zemlicka, J.
    Horacek, M.
    Radlicka, T.
    Vlcek, I.
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT, 2011, 633 : S270 - S273
  • [48] Study on the response characteristics of adaptive focusing system for flying optics
    柴雄良
    程兆谷
    高海军
    Chinese Optics Letters, 2004, (05) : 295 - 298
  • [49] FOCUSING AND DEFLECTION OF ELECTRON-BEAMS PRODUCED BY FEEDBACK MULTIPLIERS IN A FLAT TV DISPLAY
    DEWOLF, DA
    IEEE TRANSACTIONS ON ELECTRON DEVICES, 1979, 26 (09) : 1320 - 1323
  • [50] ABERRATIONS OF ELECTRON FOCUSING AND DEFLECTION SYSTEMS IN THE PRESENCE OF 3-DIMENSIONAL PERTURBATION FIELDS
    ROUSE, J
    ZHU, XQ
    MUNRO, E
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1991, 9 (06): : 2934 - 2939
12345