Micromachined self-aligned microlens(SAM) for microcolumn electron beam

被引：0
|
作者：
Seoul Natl Univ, Seoul, Korea, Republic of [1 ]
机构：
来源：
Microelectron Eng | / 1-4卷 / 413-416期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [1] Micromachined self-aligned microlens(SAM) for microcolumn electron beam
    Lee, YJ
    Kang, SH
    Chun, K
    MICROELECTRONIC ENGINEERING, 1997, 35 (1-4) : 413 - 416
  • [2] A self-aligned aperture-microlens array
    Choi, Kiwoon
    Jo, Chul Jin
    Lee, Han Sup
    RSC ADVANCES, 2014, 4 (06): : 3009 - 3015
  • [3] Self-aligned assembly of microlens arrays with micromirrors
    Tuantranont, A
    Bright, VM
    Zhang, WG
    Zhang, JL
    Lee, YC
    MINIATURIZED SYSTEMS WITH MICRO-OPTICS AND MEMS, 1999, 3878 : 90 - 100
  • [4] A novel method for fabrication of self-aligned double microlens arrays
    Ho, Jeng-Rong
    Shih, Teng-Kai
    Cheng, J. W. John
    Sung, Cheng-Kuo
    Chen, Chia-Fu
    SENSORS AND ACTUATORS A-PHYSICAL, 2007, 135 (02) : 465 - 471
  • [5] Micromachined thermoelectric IR sensors fabricated by a self-aligned process
    Xu, Dehui
    Xiong, Bin
    Wang, Yuelin
    SMART MATERIALS AND STRUCTURES, 2011, 20 (01)
  • [6] Micromachined gas detector based on self-aligned ionization tips
    Ghodsian, B
    Syrzycki, M
    Parameswaran, M
    MICROMACHINED DEVICES AND COMPONENTS IV, 1998, 3514 : 403 - 410
  • [7] Characteristics of low energy electron beam from electron beam microcolumn aligned by STM
    Park, JY
    Choi, HJ
    Kuk, Y
    Lee, Y
    Kang, S
    Chun, K
    Park, SW
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1997, 31 : S51 - S53
  • [8] SELF-ALIGNED VCSEL-MICROLENS SCANNER WITH LARGE SCAN RANGE
    Quack, N.
    Chou, J. B.
    Wu, M. C.
    2012 IEEE 25TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS), 2012,
  • [9] Micromachined Silicon Hemispherical Resonators with Self-Aligned Spherical Capacitive Electrodes
    Zhuang, Xuye
    Wang, Xinlong
    Yu, Lei
    Li, Pinghua
    Chen, Bo
    Guo, Qunying
    Guo, Shuwen
    2015 IEEE SENSORS, 2015, : 295 - 298
  • [10] Self-aligned process for single electron transistors
    Berg, EW
    Pang, SW
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2001, 19 (05): : 1925 - 1930
12345