Radio-frequency (RF) plasma etching of graphite with oxygen: a scanning tunnelling microscope study

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作者
You, Hong-Xing [1 ]
Brown, Norman M.D. [1 ]
Al-Assadi, Khalid F. [1 ]
机构
[1] Univ of Ulster, United Kingdom
来源
| 1600年 / 284期
关键词
Pyrolytic graphite - Radiofrequency plasma etching - Scanning tunneling microscopy;
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