共 50 条
- [24] RADIO-FREQUENCY MAGNETRON SPUTTERING OF RADIO-FREQUENCY BIASED QUARTZ ON A SCANNING PALLET JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1984, 2 (02): : 237 - 240
- [25] PATTERN TRANSFER ONTO CARBON-FILMS ON SILICON USING RADIO-FREQUENCY OXYGEN PLASMA-ETCHING JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1992, 10 (01): : 225 - 228
- [26] TRAPPING AND BEHAVIOR OF PARTICULATES IN A RADIO-FREQUENCY MAGNETRON PLASMA-ETCHING TOOL JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 1132 - 1135
- [29] Vibrational Temperature Estimation of Nitrogen Molecules in Radio-Frequency (RF) Produced Plasma PLASMA AND FUSION RESEARCH, 2022, 17