Characterization of Si-SiO2 interface states. Comparison between different charge pumping and capacitance techniques

被引:0
|
作者
机构
来源
| 1600年 / American Inst of Physics, Woodbury, NY, USA卷 / 74期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [41] CONTRIBUTIONS OF OXYGEN, SILICON, AND HYDROGEN TO INTERFACE STATES OF AN SI-SIO2 INTERFACE
    FAHRNER, W
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1974, 121 (06) : 784 - 787
  • [42] POSSIBILITY OF INTRINSIC SI GAP STATES LOCALIZED AT THE SI-SIO2 INTERFACE
    MARTINEZ, E
    YNDURAIN, F
    PHYSICAL REVIEW B, 1982, 25 (10): : 6511 - 6513
  • [43] ELECTRONIC STATES AT SI-SIO2 INTERFACE INTRODUCED BY IMPLANTATION OF SI IN THERMAL SIO2
    KALNITSKY, A
    BOOTHROYD, AR
    ELLUL, JP
    POINDEXTER, EH
    CAPLAN, PJ
    SOLID-STATE ELECTRONICS, 1990, 33 (05) : 523 - 530
  • [44] Spectroscopic charge pumping investigation of the amphoteric nature of Si/SiO2 interface states
    Ryan, J. T.
    Yu, L. C.
    Han, J. H.
    Kopanski, J. J.
    Cheung, K. P.
    Zhang, F.
    Wang, C.
    Campbell, J. P.
    Suehle, J. S.
    APPLIED PHYSICS LETTERS, 2011, 98 (23)
  • [45] SI-SIO2 INTERFACE - OXIDE CHARGE, ELECTRON-AFFINITY, AND FAST SURFACE-STATES
    KASPRZAK, LA
    GAIND, AK
    BULLETIN OF THE AMERICAN PHYSICAL SOCIETY, 1978, 23 (03): : 459 - 459
  • [46] CHARACTERIZATION OF SURFACE STATES AT SI-SIO2 INTERFACE USING QUASI-STATIC TECHNIQUE
    FOGELS, EA
    SALAMA, CAT
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1971, 118 (12) : 2002 - +
  • [47] Extraction of the Si-SiO2 interface trap layer parameters in MOS transistors using a new charge pumping analysis
    Maneglia, Y
    Bauza, D
    ICMTS 1998: PROCEEDINGS OF THE 1998 INTERNATIONAL CONFERENCE ON MICROELECTRONIC TEST STRUCTURES, 1998, : 201 - 205
  • [48] SPIN-DEPENDENT DLTS OF SI-SIO2 INTERFACE STATES
    LANG, DV
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1985, 132 (08) : C351 - C351
  • [49] The determination of Si-SiO2 interface trap density in irradiated four-terminal VDMOSFETs using charge pumping
    Witczak, SC
    Galloway, KF
    Schrimpf, RD
    Titus, JL
    Brews, JR
    Prevost, G
    IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1996, 43 (06) : 2558 - 2564
  • [50] CHARACTERIZATION OF INTERFACE STATES IN SUBMICROMETER MOS-TRANSISTORS BY DIFFERENT CHARGE-PUMPING TECHNIQUES
    AUTRAN, JL
    SEIGNEUR, F
    DELMAS, J
    PLOSSU, C
    BALLAND, B
    JOURNAL DE PHYSIQUE III, 1993, 3 (10): : 1947 - 1961