Fabrication of diamond membranes for MEMS using reactive ion etching of silicon

被引：0
|
作者：
California Inst of Technology, Pasadena, United States [1 ]
机构：
来源：
Thin Solid Films | / 2卷 / 62-66期
关键词：
This research work was carried out at the Jet Propulsion Laboratory; California Institute of Technology and was supported by the NASA Code Q for the Office of Safety and Mission Assurance Program 323-79. Thanks are due to Mr. Robert Candler; Mr. Jason Parish; and Ms. Cari Flohr (undergraduate students) of the Electrical Engineering Department of Auburn University for their help in the microelectronics laboratory;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
16
引用
收藏
相关论文
共 50 条
  • [1] Fabrication of diamond membranes for MEMS using reactive ion etching of silicon
    Ramesham, R
    Ellis, CD
    Olivas, JD
    Bolin, S
    THIN SOLID FILMS, 1998, 330 (02) : 62 - 66
  • [2] MEMS FABRICATION BY LITHOGRAPHY AND REACTIVE ION ETCHING (LIRIE)
    RANGELOW, IW
    HUDEK, P
    MICROELECTRONIC ENGINEERING, 1995, 27 (1-4) : 471 - 474
  • [3] Reactive ion etching of porous silicon for MEMS applications
    Lai, Meifang
    Parish, Giacinta
    Liu, Yinong
    Keating, Adrian J.
    PROCEEDINGS OF 2010 CONFERENCE ON OPTOELECTRONIC AND MICROELECTRONIC MATERIALS AND DEVICES (COMMAND 2010), 2010, : 169 - 170
  • [4] Fabrication of diamond emitter tips by reactive ion etching
    Ando, Y
    Nishibayashi, Y
    Furuta, H
    Kobashi, K
    Hirao, T
    Oura, K
    NEW DIAMOND AND FRONTIER CARBON TECHNOLOGY, 2002, 12 (03): : 137 - 140
  • [5] Reactive Ion Etching of CVD diamond films for MEMS applications
    Ding, GF
    Zhao, XL
    Yu, AB
    Yang, CS
    Cai, BC
    Yao, X
    MICROMACHINING AND MICROFABRICATION, 2000, 4230 : 224 - 230
  • [6] Optimization of Reactive Ion Etching of Polycrystalline Diamond for MEMS Applications
    Cao, Zongliang
    Varney, Michael W.
    Aslam, Dean M.
    JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2015, 24 (06) : 1681 - 1683
  • [7] The fabrication of patternable silicon nanotips using deep reactive ion etching
    Kang, Chang Kun
    Lee, Sang Min
    Jung, Im Deok
    Jung, Phill Gu
    Hwang, Sung Jin
    Ko, Jong Soo
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2008, 18 (07)
  • [8] Fabrication of Porous Silicon using Photolithography and Reactive Ion Etching (RIE)
    Pratiwi, Nur'aini Dian
    Handayani, Mita
    Suryana, Risa
    Nakatsuka, Osamu
    MATERIALS TODAY-PROCEEDINGS, 2019, 13 : 92 - 96
  • [9] Fabrication of high aspect ratio diamond tip using reactive ion etching
    Nasir, Farheen
    Pan, Aixi
    Cui, Bo
    DIAMOND AND RELATED MATERIALS, 2025, 152
  • [10] Surface smoothing of diamond membranes by reactive ion etching process
    Vivensang, C
    FerlazzoManin, L
    Ravet, MF
    Turban, G
    Rousseaux, F
    Gicquel, A
    DIAMOND AND RELATED MATERIALS, 1996, 5 (6-8) : 840 - 844
12345